Projection exposure apparatus containing an enclosed hollow stru

Details Projection exposure apparatus containing an enclosed hollow stru Projection exposure apparatus containing an enclosed hollow stru

1995-09-20

1997-11-25

Moses, R. L.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, G03B 2758

Patent

active

056918062

ABSTRACT:
A projection lens, a reticle stage and a light source optical system are supported by a cast frame above a wafer stage for holding a wafer thereon. A top portion of the cast frame has an enclosed hollow structure in which strengthening ribs are built, thereby substantially increasing the rigidity of the top portion. Since the ribs are built in the top portion of the cast frame, the surface area exposed to the wafer stage is reduced. As a result, there is little chance that the wafer is contaminated by any adherents to the cast frame.

REFERENCES:
patent: 4724466 (1988-02-01), Ogawa et al.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5285995 (1994-02-01), Gonzalez et al.
patent: 5334434 (1994-08-01), Shiota et al.
patent: 5446519 (1995-08-01), Makinouchi

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