Assembly for measuring a trench depth parameter of a workpiece

Details Assembly for measuring a trench depth parameter of a workpiece Assembly for measuring a trench depth parameter of a workpiece

1996-04-30

1997-11-25

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

356355, G01B 1122

Patent

active

056915403

ABSTRACT:
An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.

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