Method for the hybrid integration of discrete elements on a semi

Details Method for the hybrid integration of discrete elements on a semi Method for the hybrid integration of discrete elements on a semi

1998-05-15

2000-12-12

Ullah, Akm E.

Optical waveguides

With disengagable mechanical connector

Optical fiber to a nonfiber optical device connector

G02B 636

Patent

active

061589012

ABSTRACT:
A method and apparatus is provided for locating with improved vertical positioning accuracy a discrete element on a semiconductor optoelectronic integrated circuit. The method employs an etch stop layer located beneath a series of semiconductor layers. The semiconductor layers may include waveguides to couple light between integrated or discrete elements. Pits with accurate depth are etched in the semiconductor layers down to the etch stop layer. Accurate alignment between a discrete element and another element is made possible by controlling their respective distances from the etch stop layer.

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G.S. Oehrlein, et al. "Selective Dry Etching of Germanium with Respect to Silicon and Vice Versa", Journal of the Electrochemical Society 138 (1991) May, No. 5, pp. 1443-1451.

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