Method and apparatus having RF biasing for sampling a plasma int

Details Method and apparatus having RF biasing for sampling a plasma int Method and apparatus having RF biasing for sampling a plasma int

1986-04-10

1987-07-21

Church, Craig E.

Radiant energy

Ionic separation or analysis

With sample supply means

250281, 250282, 250423R, 31511181, H01J 4910

Patent

active

046820264

ABSTRACT:
A plasma generated within an induction coil is sampled through a sampler orifice into a first vacuum chamber stage and then through a skimmer orifice into a second vacuum chamber stage for mass analysis of trace ions in the plasma. Arcing at the orifices is reduced or prevented by applying, to the plates containing the orifices, an RF bias voltage derived from the generator which powers the coil. Since optimum ion transmission is highly dependent on the phase and amplitude of the RF bias, phase and amplitude adjustment networks are provided to optimize the ion count. Alternatively, arcing at the sampler orifice can be eliminated by grounding the induction coil at or near its center and the RF bias can be applied only to the plate containing the skimmer orifice.

REFERENCES:
patent: 3944826 (1976-03-01), Gray
patent: 4501965 (1985-02-01), Douglas

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