Polishing machine having a taut microabrasive strip and an impro

Details Polishing machine having a taut microabrasive strip and an impro Polishing machine having a taut microabrasive strip and an impro

1993-09-27

1994-08-09

Rose, Robert A.

Abrasive tool making process, material, or composition

With carbohydrate or reaction product thereof

51 62, 51283R, B24B 2104, B24B 722

Patent

active

053354532

ABSTRACT:
A polishing machine having a taut microabrasive sheet. The machine includes a machine polishing disk in the form of a planar reference disk and a microabrasive sheet held taut on the disk by an appropriate mechanism. The mechanism for holding the microabrasive sheet taut can be a delivery roll and a receiving roll. The machine can be applied to the polishing of silicon wafers containing integrated components and in particular magnetic read-write heads.

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