Surface acoustic wave device having buried transducer

Details Surface acoustic wave device having buried transducer Surface acoustic wave device having buried transducer

1980-06-27

1982-09-21

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

333153, 333154, 358213, H03H 932

Patent

active

043509169

ABSTRACT:
An acoustic wave device wherein each electrode element of an interdigital transducer is buried or embedded between a pair of layers of piezoelectric material. The use of a multi-layer stack of layers of piezoelectric material enables each electrode element of the transducer to be sandwiched between a distinct pair of layers and thus to be insulated from the other electrode element or elements. Because of the insulation thus provided, the spacing between the fingers of each electrode element may be selected without fear of causing short circuits between electrode elements.

REFERENCES:
patent: 3825779 (1974-07-01), de Klerk
patent: 3955160 (1976-05-01), Duffy
patent: 4025954 (1977-05-01), Bert
patent: 4037176 (1977-07-01), Ono et al.
A. Armstrong et al., "High Coupling Efficiency for ZnO Overlays on Lithium Niobate", IEEE, 1972, Symposium on Sonics and Ultrasonics.
Y. Shimizu et al., "Unidirectional S.A.W. Transducers with a ZnO Film on Glass Substrate", Electronics Letters, 23 Jun. 77, vol. 13, No. 13, p. 384.
G. S. Kino et al., "Theory of Interdigital Couplers on Non-piezoelectric Substrates", JAP, Apr. '73, vol. 44, No. 4, p. 1480.
S. K. Yao, "Guided-Wave acousto-Optical Devices on Si", Soc. of Photo-Optical Instrumentation Engr. 27 Aug. '79, vol. 202, pp. 90-95.

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