Electric resistance heating devices – Heating devices – Radiant heater
Patent
1997-08-07
2000-06-13
Walberg, Teresa
Electric resistance heating devices
Heating devices
Radiant heater
392418, A21B 200, F26B 1900
Patent
active
060759224
ABSTRACT:
A process and system for preventing gases from either leaking into or out of a thermal processing chamber that is designed to operate at or near atmospheric pressure is disclosed. For instance, in one embodiment, gases are prevented from leaking into a thermal processing chamber by maintaining the pressure within the chamber at levels that are slightly greater than atmospheric pressure. In an alternative embodiment, in order to prevent gases from leaking out of the chamber, the pressure within the chamber is maintained at levels slightly less than atmospheric pressure. During operation of the thermal processing chamber, a gas is continuously circulated through the chamber. In order to carry out the process of the present invention, a pressure control device can be placed upon the gas outlet for maintaining the pressure within the chamber within a desired range.
REFERENCES:
patent: 4762576 (1988-08-01), Wilson et al.
patent: 4986216 (1991-01-01), Ohmori et al.
patent: 5315092 (1994-05-01), Takahashi et al.
patent: 5443997 (1995-08-01), Tsui et al.
patent: 5445699 (1995-08-01), Kamikawa et al.
patent: 5455082 (1995-10-01), Saito et al.
Hu Yao Zhi
Tay Sing Pin
Wasserman Yuval
Fuqua Shawntina T.
Steag RTP Systems, Inc.
Walberg Teresa
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