Microspectrometer with sacrificial layer integrated with integra

Details Microspectrometer with sacrificial layer integrated with integra Microspectrometer with sacrificial layer integrated with integra

1994-04-25

2000-11-14

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

359579, G01B 902

Patent

active

061477567

ABSTRACT:
The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

REFERENCES:
patent: 2937562 (1960-05-01), Robillard
patent: 4772786 (1988-09-01), Langdon
patent: 4825262 (1989-04-01), Mallinson
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4973131 (1990-11-01), Carnes
patent: 5142414 (1992-08-01), Koehler
"A Miniature Fabry-Perot Interferometer Fabricated Using Silicon Micromachining Techniques," by J.H. Jerman et al., (1988), pp. 16-18.

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