Apparatus and method for measuring displacement

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination

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702 94, 702150, 702158, 364182, 36447435, G01B 700

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active

059704322

ABSTRACT:
In apparatus and method for measuring a displacement of an object to be measured, a magnitude of the displacement is derived on the basis of a difference in periods of a phase modulated signal and a reference signal, a ratio between the periods of a basic clock and of an interpolation clock which is varied according to the magnitude of the displacement, a clock signal whose period is a multiplication of a period of the basic clock by the ratio as a multiplier, a pulse train signal is created whose number of pulses are given by the magnitude of the displacement and supplied to an A/B phase converter.

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patent: 5663643 (1997-09-01), Matuyama

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