Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Patent
1997-06-30
1999-10-19
Dutton, Brian
Semiconductor device manufacturing: process
Making passive device
Stacked capacitor
438253, 438255, 438398, H01L 218242
Patent
active
059703580
ABSTRACT:
A capacitor and method for forming a capacitor is disclosed and which includes providing a node to which electrical connection is to be made; forming a first layer of conductive material to a first thickness over and in electrical connection with the node; forming a second layer of insulative material to a second thickness over the first layer, the second thickness being greater than the first thickness; forming a third layer of conductive material to a third thickness over the second layer; forming the first, second and third layers into a first capacitor plate; and forming a capacitor dielectric layer and second capacitor plate operatively adjacent the first capacitor plate.
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Dutton Brian
Micro)n Technology, Inc.
Thomas Toniae M.
LandOfFree
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