Piezoelectric film element and manufacturing method thereof, and

Details Piezoelectric film element and manufacturing method thereof, and Piezoelectric film element and manufacturing method thereof, and

1998-06-22

2000-11-14

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310364, H01L 4108

Patent

active

06147438&

ABSTRACT:
The present invention provides a piezoelectric film element with improved adhesion between a first protective film and a substrate. This invention also provides a method of manufacturing a piezoelectric film element, which makes it possible to selectively form, by a hydrothermal synthesis, a piezoelectric film with excellent piezoelectric properties in a specified area. This piezoelectric element comprises, over a substrate 12: a piezoelectric film; a common electrode and an individual electrode located to hold the piezoelectric film in between; a first protective film 14 which is formed over almost the entire surface of the substrate 12 and which protects the substrate 12 to avoid the formation of the piezoelectric film directly over the substrate 12; and a base film 16 which is formed over the first protective film 14 in the area for forming the piezoelectric film, and which functions as a base when the piezoelectric film is caused to grow to be formed. The piezoelectric film is formed over the base film 16.

REFERENCES:
patent: 5714194 (1998-02-01), Komai et al.
patent: 5802686 (1998-09-01), Shimada et al.
patent: 6013970 (2000-01-01), Nishiwaki et al.

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