Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Patent
1996-08-26
1999-02-16
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
438 29, 438 31, H01L 2100
Patent
active
058720200
ABSTRACT:
A method for producing a semiconductor laser device includes the steps of: forming a reflection protective film on a light-emitting facet of a semiconductor laser device; and removing an unwanted reflection protective film formed on a portion other than the light-emitting facet by an etching technique. Furthermore, an apparatus for producing a semiconductor laser device, includes: a formation section forming a reflection protective film on a light-emitting facet of a semiconductor laser device; an etching section removing an unwanted reflection protective film formed on a portion other than the light-emitting facet by an etching technique; a device inverting section turning the semiconductor laser device upside down; and a device transferring section transferring the semiconductor laser device among the formation section, the etching section, and the device inverting section in a predetermined order.
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Nguyen Tuan H.
Sharp Kabushiki Kaisha
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