Method of detecting a focus defect of an electron microscope ima

Details Method of detecting a focus defect of an electron microscope ima Method of detecting a focus defect of an electron microscope ima

1985-12-09

1987-09-22

Howell, Janice A.

Radiant energy

Automatic/serial detection of similar sources

250311, 250397, H01J 3721, H01J 37153

Patent

active

046957251

ABSTRACT:
A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen in an electron microscope to enable the image sensor to store the energy of the electron beam. Then, stimulating energy is applied to the image sensor to discharge the stored energy as light. The light discharged from the image sensor is photoelectrically detected to produce an image signal. A defocus value of the image is detected on the basis of the image signal. The image signal is also subject electrically to the Fourier transform to produce a converted image signal indicative of a ring pattern. The degree of one ring, the length of minor and major axes of the ring, and the angle of inclination of the major axis are computed from the converted image signal for computing currents to be fed to a stigmeter of the electron microscope to eliminate astigmatism.

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