Method for manufacturing carbon nanotubes as functional elements

Details Method for manufacturing carbon nanotubes as functional elements Method for manufacturing carbon nanotubes as functional elements

1999-09-28

2000-11-14

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

061462276

ABSTRACT:
A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.

REFERENCES:
patent: 5764004 (1998-06-01), Rabinowitz
patent: 5773921 (1998-06-01), Keesmann et al.
patent: 5973444 (1999-10-01), Xu et al.
W. Z. Li et al., Large-Scale Synthesis of Aligned Carbon Nanotubes, Dec. 6, 1996, Science, 1701-1703.

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