Optics: measuring and testing – Inspection of flaws or impurities
Patent
1998-08-25
2000-10-31
Pham, Hoa Q.
Optics: measuring and testing
Inspection of flaws or impurities
324 731, 324523, 324524, 324752, 324537, 324765, G01N 2100, G01R 2714
Patent
active
061410934
ABSTRACT:
An apparatus and corresponding method for detecting, locating, or defining a short in a thin-film module. The apparatus includes a mechanical fixture supporting the module. A current source provides a current pulse to the module which produces a magnetic field and heating nearby the short which turns on and off as the pulsed current in the short turns on and off. Polarized light is directed onto the module, with an intermediate element disposed between the module and the source of the polarized light. The intermediate element may be a stress birefringent coating (e.g., a polyimide insulating layer) disposed on the module and onto which the polarized light is directed. The sample is rotated 0 to 45 degrees to maximize the birefringent effect. Alternatively, the intermediate element may be a magneto-optical Faraday rotator. A microscope is used to observe the module, facilitating identification of a short by the twisting of the polarization of the light as the short expands and shrinks in response to the heating or in response to the localized magnetic field. The preferred rotator is a composite having a garnet substrate, an iron garnet film disposed on the substrate, and a thin aluminum mirror layer disposed on the iron garnet film. The apparatus and method of the present invention have several applications.
REFERENCES:
patent: 5087874 (1992-02-01), Robinson
patent: 5640099 (1997-06-01), Sanada
patent: 5844249 (1998-12-01), Takano et al.
patent: 5936408 (1999-08-01), Scaman
Argyle Bernell E.
Halperin Arnold
Scaman Michael E.
Yarmchuk Edward J.
International Business Machines - Corporation
Pham Hoa Q.
Townsend Tiffany L.
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