Methods for preparing devices having metallic hollow microchanne

Details Methods for preparing devices having metallic hollow microchanne Methods for preparing devices having metallic hollow microchanne

1997-01-27

1999-02-16

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Unitary plural outlet means

239589, 239596, 205 73, 205 75, A62C 208

Patent

active

058711589

ABSTRACT:
The present invention is directed to methods for preparing devices having hollow metallic microchannels on a surface of a planar substrate. More specifically, the present invention is directed to methods for preparing devices having surface metallic microchannels with a range of widths and heights selected to provide efficient flow characteristics and having thick and, thus, strong and durable channel walls. In addition, the methods of the present invention are compatible with standard integrated circuit fabrication techniques and, because the microchannels are formed upon the surface of the substrate without degrading the surface planarity, these techniques can be used to incorporate electronic circuitry into the microchannel-containing devices. For purposes of this application, the term "microchannel" refers to enclosed or partially enclosed channels having heights within the range from about 2 to about 200 micrometers (.mu.m) and widths within the range of about 10 micrometers to about 2 millimeters.

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