Semiconductor wafer transfer apparatus

Material or article handling – Device for emptying portable receptacle – For emptying contents thereof into portable receiving means

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Details

294 871, 414417, B65G 6500

Patent

active

046952179

ABSTRACT:
An apparatus is disclosed for the bulk transfer of pluralities of semiconductor wafers or slices from container to container. The device includes a stage adapted to receive a standard semiconductor wafer container and a plurality of vertical storage slots are provided above the stage. A pneumatically controlled elevation device is utilized to raise a plurality of semiconductor wafers from each container into the storage slots and an automatic wafer retainer is selectively rotated in response to each operation of the elevation device to retain the semiconductor wafers within the storage slots. In a preferred mode of the present invention the wafer retainer is designed to permit insertion and retention of a first plurality of semiconductor wafers into odd numbered storage slots while permitting insertion of a second plurality of semiconductor wafers into even numbered storage slots.

REFERENCES:
patent: 3340176 (1967-09-01), Belluso et al.
patent: 3934733 (1976-01-01), Worden
patent: 3949891 (1976-04-01), Butler et al.
patent: 4431361 (1984-02-01), Bayne
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4457661 (1984-07-01), Flint et al.
patent: 4573851 (1986-03-01), Butler

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