Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1996-04-03
2000-10-31
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
H01L 4108
Patent
active
061407461
ABSTRACT:
A piezoelectric thin film which has good properties, for example, a high dielectric constant and a high piezoelectric strain constant is disclosed. A method for producing a piezoelectric film, which causes no crack during annealing, is also disclosed. The piezoelectric thin film has a thickness in the range of from 0.5 to 20 .mu.m, comprises crystal grains having an average grain diameter of 0.005 to 0.2 .mu.m, and is free from any multilayer structure in its cross section. The process for producing a piezoelectric thin film comprises that steps of: coating a substrate with a sol composition comprising a sol, of a metal component for constituting a piezoelectric film, and a polymer compound and then drying the coating to form a film; pre-sintering the film to form a porous thin film of gel comprising an amorphous metal oxide; pre-annealing the porous thin film of gel to bring the film to a film formed of a crystalline metal oxide; repeating the above steps at least once to form a laminated film formed of a crystalline metal oxide; and annealing the laminated film to grow crystal grains of perovskite type in the film into a larger size.
REFERENCES:
patent: 3424686 (1969-01-01), Ouchi et al.
patent: 3425944 (1969-02-01), Ouchi et al.
patent: 3484377 (1969-12-01), Tsubouchi et al.
patent: 3956150 (1976-05-01), Ouchi et al.
patent: 4355256 (1982-10-01), Perduiju et al.
patent: 4383196 (1983-05-01), Perduijn et al.
patent: 4830996 (1989-05-01), Hirai et al.
patent: 5198269 (1993-03-01), Swartz
patent: 5265315 (1993-11-01), Hoisington
patent: 5622901 (1997-04-01), Fukada
patent: 5634999 (1997-06-01), Takeuchi et al.
Guanghua, Y. et al. "Preparation of PB(Zr, Ti)O.sub.3 "Journal of Applied Physics, Sep. 1, 1988, USA, vol. 64 Nos. ISSN 0021&8979.
Amanuma, K., et al. "Ferroelectric Properties of Sol-Gel Derived Pb(Zr, Ti)O.sub.3 Thin Films." Jpn. J. Appl. Phys., vol. 32, No. 9B (Sep. 1993) pp. 4150-4153.
Reaney, I. M., et al. "Use of Transmission Electron Microscopy for the Characterization of Rapid Thermally Annealed, Solution-Gel, Lead Zirconate Titanate Films." Journal of the American Ceramic Society, vol. 77, No. 5 pp. 1209-1216, Dec. 1994.
Brooks, K. G., et al. "Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates" J. Mater. Res., vol. 9, No. 10 (Oct. 1994) p. 2540-2553.
Miyashita Satoru
Murai Masami
Shinozuka Masakazu
Sumi Kouji
Takahashi Tetsushi
Dougherty Thomas M.
Seiko Epson Corporation
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