Method of manufacturing a composite substrate and a piezoelectri

Details Method of manufacturing a composite substrate and a piezoelectri Method of manufacturing a composite substrate and a piezoelectri

1996-05-07

1997-12-16

Tsai, Jey

Fishing, trapping, and vermin destroying

437921, 148DIG12, H01L 2156, H01L 21463

Patent

active

056984715

ABSTRACT:
A method of manufacturing a composite substrate and the composite substrate manufactured thereby wherein surfaces of first and second substrates having different thermal expansion coefficients are mirror finished and layered on each other. A first heat treatment is applied after which a part of the second substrate is removed to a depth sufficient to expose the first substrate. A final second heat treatment directly bonds the substrates.

REFERENCES:
patent: 5344524 (1994-09-01), Sharma et al.
patent: 5346848 (1994-09-01), Grupen-Shemansky et al.
patent: 5453394 (1995-09-01), Yonehara et al.

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