Optical: systems and elements – Diffraction – From zone plate
Patent
1989-08-29
1992-11-03
Arnold, Bruce Y.
Optical: systems and elements
Diffraction
From zone plate
359355, 359569, 359742, 101473, 353 53, G02B 308, G02B 2744, B41M 500
Patent
active
051610590
ABSTRACT:
A high-efficiency, diffractive optical element having at least one surface including multilevel steps, the steps determined by calculating equiphase boundaries utilizing a disclosed equation and algorithm. The optical element can be adapted to correct for chromatic and/or spherical aberration, and can be used in UV lithographic apparatus.
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Swanson Gary J.
Veldkamp Wilfrid B.
Arnold Bruce Y.
Massachusetts Institute of Technology
Parsons David R.
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