Silicon micro-machined accelerometer using integrated electrical

Details Silicon micro-machined accelerometer using integrated electrical Silicon micro-machined accelerometer using integrated electrical

1998-12-04

2000-11-14

Kwok, Helen C.

Measuring and testing

Speed, velocity, or acceleration

Structural installation or mounting means

7351429, G01P 102

Patent

active

061453803

ABSTRACT:
An integrated sensor package formed using low temperature co-fired ceramic assembly techniques and method for manufacturing same.

REFERENCES:
patent: 4991283 (1991-02-01), Johnson et al.
patent: 5433110 (1995-07-01), Gertz et al.
patent: 5581032 (1996-12-01), Uemura et al.
patent: 5602421 (1997-02-01), Li
patent: 5650567 (1997-07-01), Ueda et al.
patent: 5767404 (1998-06-01), Kaiser et al.
patent: 5881598 (1999-03-01), Sapuppo et al.

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