Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1991-01-17

1992-11-03

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 54, 355 74, 355 68, 355 71, G03B 2742

Patent

active

051609622

ABSTRACT:
A projection exposure apparatus is disclosed which includes an illumination system with a masking mechanism having an aperture of variable shape, a projection optical system, a photoreceptor disposed adjacent to an image plane of the projection optical system, and an adjuster for adjusting the masking mechanism, wherein the adjuster is contributable to reduce the size of the aperture and to shift the position of the aperture, such that, with the cooperation of the projection optical system, a relatively small light pattern is produced on the image plane and the produced light pattern is displaced along the image plane, and wherein the photoreceptor receives light from the produced light pattern.

REFERENCES:
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patent: 4589769 (1986-05-01), Matsuki
patent: 4634240 (1987-01-01), Suzuki et al.
patent: 4659228 (1987-04-01), Totsuka et al.
patent: 4675702 (1987-06-01), Gerber
patent: 4746958 (1988-05-01), Yamakawa
patent: 4780747 (1988-10-01), Suzuki et al.
patent: 4871257 (1989-10-01), Suzuki et al.
patent: 4931830 (1990-06-01), Suwa et al.

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