Electric heating – Metal heating – By arc
Patent
1997-10-23
1999-10-19
Evans, Geoffrey S.
Electric heating
Metal heating
By arc
B23K 2600
Patent
active
059683830
ABSTRACT:
An excimer laser annealing apparatus with an optical system. The optical system includes a cylindrical concave lens (A), a cylindrical convex lens (B), a fly-eye lens (C) made of a cylindrical lens array provided in a lateral direction and a fly eye lens (D) made of a cylindrical lens array provided in a vertical direction. The laser light is changed from an initial gaussian distribution to a rectangular distribution by virtue of the fly-eye lenses. The laser beam then passes through cylindrical convex lenses (E and F) and is reflected by a mirror (G) and is focused on the specimen by a cylindrical lens (H). The homogenous rectangular beam created has a longer width than the specimen so that the specimen may only be moved along one direction.
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Ishihara Hiroaki
Yamazaki Shunpei
Zhang Hongyong
Evans Geoffrey S.
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
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