Process for making Schottky-barrier gate FET

Fishing – trapping – and vermin destroying

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148DIG84, 357 91, 437175, H01L 21265

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active

046945636

ABSTRACT:
This invention is concerned with an improved Schottky-barrier gate field effect transistor, which comprises a semi-insulating semiconductor substrate, an active layer formed on the surface of the semiconductor substrate and a source electrode, Schottky-barrier gate electrode and drain electrode formed on the active layer, in which the active layer has a first part having such a thickness as to give a predetermined pinch-off voltage and being formed near the gate electrode and a second part having a substantially similar carrier concentration to that of the first part and a larger thickness than the first part and being formed between the Schottky-barrier gate electrode and source electrode, and the upper surfaces of the first part and second part of the active layer are in a same plane.

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Lee et al, Appl. Phys. Letts., 37 (1980), 311.
1981 IEEE International Solid-State Circuits Conference, pp. 218-219.
Electronics Letters, 4th February 1982, vol. 18, No. 3, pp. 119-121.

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