Process for nitriding silicon containing materials

Details Process for nitriding silicon containing materials Process for nitriding silicon containing materials

1991-11-04

1992-11-03

Chaudhuri, Olik

Chemistry of inorganic compounds

Silicon or compound thereof

Binary compound

264 65, 423406, C01B 3300, C04B 3558

Patent

active

051607190

ABSTRACT:
A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by subjecting it to a nitriding atmosphere containing at least nitrogen gas in combination with at least one other nitriding gas while keeping the composition of the nitriding atmosphere substantially constant by maintaining a substantially constant partial pressure of nitrogen gas during the nitriding, even though nitrogen is being consumed during the nitriding step to form the silicon nitride.

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