Method and apparatus for ion beam neutralization

Details Method and apparatus for ion beam neutralization Method and apparatus for ion beam neutralization

1996-08-02

1997-12-30

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250251, H01J 37317, H01L 21265

Patent

active

057033757

ABSTRACT:
Method and apparatus for maintaining an ion beam along a beam path from an ion source to an ion implantation station where workpieces are treated with the ion beam. An ion beam neutralizer is positioned upstream from the ion treatment station and includes confinement structure which bounds the ion beam path. An electron source positioned within the confinement structure emits electrons into the ion beam. An array of magnets supported by the confinement structure creates a magnetic field which tends to confine the electrons moving within the confinement structure. An interior magnetic filter field is created inside the confinement structure by a plurality of axially elongated filter rods having encapsulated magnets bounding the ion beam and oriented generally parallel to the ion beam path. This interior magnetic field confines higher energy electrons from leaving the ion beam path and permits lower energy electrons to drift along the ion beam.

REFERENCES:
patent: 4804837 (1989-02-01), Farley
patent: 5164599 (1992-11-01), Benveniste
patent: 5531420 (1996-07-01), Benveniste
Wollnik, Hermann Optics of Charged Particles, Academic Press, Inc., pp. 118-119, 280-285, (1987) no month.
Holmes, AJT Electron Flow Through Transverse Magnetic Fields in Magnetic Multipole Arc Discharges, American Institute of Physics, pp. 1517-1522, Oct. 1982.
HF Glavish, Magnet Optics for Beam Transport, Nuclear Instruments and Methods 189, North-Holland Publishing company, pp. 43-53, (1981) no month.

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