Stepper vacuum chuck wiper

Details Stepper vacuum chuck wiper Stepper vacuum chuck wiper

1996-11-29

1998-04-21

Chin, Randall

Brushing, scrubbing, and general cleaning

Implements

Fabric

15105, 362 91, 362119, A47L 2500

Patent

active

057405808

ABSTRACT:
The present invention discloses a stepper vacuum chuck wiper for cleaning a stepper vacuum chuck, which includes a rod frame, a bearing device, a flare type soft shield, a wiping stick and an illuminating device. The rod frame has a through hole at one end and the bearing device is sleeved inside of the through hole. The flare type soft shield with a flare opening on its lower end is sleeved inside the bearing device, and the diameter of the flare opening is larger than the outside diameter of the bearing device. The wiping stick is sleeved inside the flare type soft shield. The illuminating device for illuminating the stepper vacuum chuck includes a light source, a battery set and a switch. The battery set is coupled to the other end of the rod frame to provide electricity to the light source, and the switch is coupled between the battery set and the light source to control the illumination of the light source, wherein the light source and the switch are disposed on the rod frame.

REFERENCES:
patent: 2232680 (1941-02-01), Foster
patent: 4642738 (1987-02-01), Meller
patent: 4845796 (1989-07-01), Mosley

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