Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1998-06-23
2000-10-31
Turner, Archene
Stock material or miscellaneous articles
Composite
Of inorganic material
428469, 428472, 428704, 428901, 269289R, 118726, 118728, 432253, 432262, 432264, 432265, 414535, 2481761, 24834601, 206710, 206832, C04B 4100
Patent
active
061399833
ABSTRACT:
This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least one element selected from the group consisting of rare earth elements and alkaline earth elements.
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patent: 4711861 (1987-12-01), Sawamura et al.
patent: 4746637 (1988-05-01), Kasori et al.
patent: 5063183 (1991-11-01), Taniguchi et al.
patent: 5314850 (1994-05-01), Miyahara
patent: 5409869 (1995-04-01), Ueno et al.
Chemical Abstracts, vol. 128, No. 7; Feb. 16, 1998; Columbus, OH; abstract No. 78835; Toyoda et al.: "Aluminum Nitride Substrate for Semiconductor Manufacturing Devices and the Manufacture" XP002082671 *abstract* & JP 09 328382 A (Mitsubishi Materials Corp) & Patent Abstracts of Japan, vol. 98, No. 4; Mar. 31, 1998 & JP 09 328382 A (Mitsubishi Materials Corp) *abstract; claim 14*.
Araki Kiyoshi
Katsuda Yuji
Ohashi Tsuneaki
Shimura Sadanori
NGK Insulators Ltd.
Turner Archene
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