Robot arm relocation system

Material or article handling – Device for emptying portable receptacle – Nongravity type

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Details

74 8921, 7449004, 7449009, 414935, 414937, B25J 912

Patent

active

061392456

ABSTRACT:
An apparatus for moving substrates into and out of a substrate processing device. The apparatus has a frame and a substrate transport. The frame is adapted to be connected to the substrate processing device and can removably receive substrate cassettes. The substrate transport is movably mounted to the frame. The substrate transport has a track movement mechanism and a movable robot arm assembly mounted to the track movement mechanism. The track movement mechanism includes a housing, two pulley spindles rotatably connected to the housing, a drive motor connected to one of the pulley spindles, and flexible connecting elements connected to the frame and looped in a general S shape around the two pulley spindles.

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