Metal working – Method of mechanical manufacture – Electrical device making
Patent
1990-11-30
1992-11-03
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
437 8, 324158R, H05K 302
Patent
active
051597527
ABSTRACT:
A scanning electron microscope (28) is connected to a test structure (48) formed on a semiconductor wafer. The test structure (48) comprises a plurality of first parallel structures (54) and a plurality of second parallel structure (56) transverse to and interlocking with the first structures (54). An island (60) is formed within a grid (58) formed by the structures (54-56) and is separated therefrom. An electron beam (38) from the scanning electron microscope (28) is aimed at the structure (48) and secondary electrons emitted therefrom are visually displayed on a monitor (44). The visual display (47) provides information on whether the island (60) is electrically separated from the mesh (58) or shorted thereto by comparing the intensity of the various islands (60).
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Aton Thomas J.
Gale Rebecca J.
Mahant-Shetti Shivaling S.
Arbes Carl J.
Barndt B. Peter
Donaldson Richard L.
Matsil Ira S.
Texas Instruments Incorporated
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