Optical proximity imaging method and apparatus

Details Optical proximity imaging method and apparatus Optical proximity imaging method and apparatus

1986-02-28

1987-07-21

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356375, G01B 1114

Patent

active

046814515

ABSTRACT:
An optical proximity imaging method and apparatus in which the proximity of glass surface to another surface is determined by frustration of total internal reflection of light energy from the glass surface to develop a light area pattern, calibrating gray scale densities of the pattern so that levels of density correspond to increments of surface proximity, and displaying a facsimile of the gray scale image to indicate variations in surface proximity. The pattern of frustrated totally reflected light energy is preferably magnified and the magnified image recorded by a television camera, the output of which is fed, in a preferred embodiment, to an oscilloscope capable of displaying a three axis image in which one of the three axes is determined by variation in gray scale density. In another embodiment, the output of the television camera is fed through a colorizer to assign different colors to different gray scale densities and a colored facsimile of the pattern image presented on a CRT screen.

REFERENCES:
patent: 2997922 (1961-08-01), Kaprelian
patent: 3338656 (1967-08-01), Astheimer
patent: 3987668 (1976-10-01), Popenoe
patent: 4032889 (1977-06-01), Nassimbene
patent: 4083254 (1978-04-01), Nissl
patent: 4165155 (1979-08-01), Gordon, II et al.
patent: 4286468 (1981-09-01), Altman
patent: 4322979 (1982-04-01), Fromm
patent: 4451123 (1984-05-01), McNeill et al.
Harrick, Total Internal Reflection and Its Application to Surface Studies", Annals of the New York Academy of Sciences, vol. 101, 1963, pp. 928-959.

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