Field emission cold cathode and method of fabricating the same

Electric lamp and discharge devices – Electrode and shield structures – Point source cathodes

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313495, 313497, 313309, 313351, H01J 130

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060911883

ABSTRACT:
There is provided a field emission cold cathode including a semiconductor substrate, an insulating layer formed on the semiconductor substrate, an electrically conductive gate electrode layer formed on the insulating layer, a plurality of cavities being formed throughout both the insulating layer and the gate electrode layer, a conical emitter formed on the semiconductor substrate in each one of the cavities, and an insulating wall formed at least in the semiconductor substrate so that the insulating wall surrounds each one of the cavities. The insulating wall partitions the semiconductor substrate into a first group of blocks located at a marginal end of the semiconductor substrate and a second group of blocks located within the first group of blocks. Each one of the first group of blocks is designed to have a greater area than an area of each one of the second group of blocks. The field emission cold cathode makes it possible to uniformize an emission current in all of the blocks to thereby provide uniform brightness to images in a display area.

REFERENCES:
patent: 4940916 (1990-07-01), Borel et al.
patent: 5528103 (1996-06-01), Spindt et al.
patent: 5550435 (1996-08-01), Kuriyama et al.
patent: 5559389 (1996-09-01), Spindt et al.
patent: 5789857 (1998-08-01), Yamaura et al.
"A Thin-Film Field-Emission Cathode" Spindt; J. Applied Physics, vol. 39; No. 7, Jun. 1968; pp. 3504-3505.

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