Integrated semiconductor waveguide/photodetector

Details Integrated semiconductor waveguide/photodetector Integrated semiconductor waveguide/photodetector

1988-08-29

1991-04-09

James, Andrew J.

357 19, 357 30, 350 9612, 350 9615, H01L 29161, H01L 29205, H01L 29225

Patent

active

050069063

ABSTRACT:
An integrated waveguide/detector optical device is fabricated on a semiconductor substrate whose surface includes a step region. Guiding and absorbing layers are grown on the surface in sequence overlying the step region. This is done in a single epitaxial growth cycle. The absorbing layer is patterned to form a non-planar detector that overlies the guiding layer in the step region. Due to bending of the guiding layer in the step region, a strong coupling exists between the overlying detector and light propagating in the guiding layer. Easily fabricated integrated devices having short-length (high-speed) photodetectors are thereby made feasible.

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