Process for producing a structure integrating a cleaved optical

Details Process for producing a structure integrating a cleaved optical Process for producing a structure integrating a cleaved optical

1994-07-11

1996-05-21

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

1566471, H01L 21465

Patent

active

055189652

ABSTRACT:
In a process for producing integrated structures having at least one cleaved optical guide, the following are successively epitaxied onto a planar surface of a monocrystalline substrate parallel to a plane of the substrate having crystal orientation <1,0,0>: an etching barrier layer for the substrate, a lower optical confinement layer, an active layer and an upper optical confinement layer. Then, the epitaxied layers are etched to form an optical guide strip having a portion oriented parallel to a first direction of crystal orientation <0,1,1> of the substrate.

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