Method of isolating vertical shorts in an electronic array using

Details Method of isolating vertical shorts in an electronic array using Method of isolating vertical shorts in an electronic array using

1993-09-02

1996-05-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437922, 437923, 21912169, 359 36, H01L 2126

Patent

active

055189563

ABSTRACT:
A process for repairing an electronic army wafer assembly having a short circuit between two non-insulative layers separated by a dielectric layer includes the step of selectively ablating one of the non-insulative layers so as to electrically isolate the situs of the short circuit while maintaining the electrical integrity of the underlying non-insulative layer intact. A laser beam is directed onto the non-insulative layer and scanned in a selected pattern to isolate the situs of the short circuit; the laser is further controlled such that a selected energy density is delivered to the surface to be ablated such that the underlying non-insulative layer is not damaged.

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