Production of strontium titanate thin films

Details Production of strontium titanate thin films Production of strontium titanate thin films

1994-02-15

1996-05-21

Beck, Shrive

Coating processes

Immersion or partial immersion

4271261, 4271262, 4271263, B05D 118

Patent

active

055187765

ABSTRACT:
A thin film of strontium titanate is formed on a substrate by immersing a substrate in an aqueous solution containing strontium ions and titanium alkoxide. The aqueous solution may contain not more than 20 vol % of one or more alkanolamines expressed by the general formula:

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patent: 4946710 (1990-08-01), Miller et al.
patent: 5160762 (1992-11-01), Brand et al.
The Condensed Chemical Dictionary, 10th ed., pp. 958, 1981 (no month).
Selvaraj et al., "Sol-gel thin films of strontium titanate (SrTiO.sub.3) from chemically modified alkoxide precursors", Materials Letters, 12(5) 311-15, 1991 (no month).
Chen et al., "Barium and strontium titanate films from hydroxide-alkoxide precursors", J. Mat. Sci. Let. 10 (1991) 1000-1002.
Takahashi et al., "Dip-coating of TiO.sub.2 films using a sol derived from Ti(O-i-Pr).sub.4 -diethanolamine-H.sub.2 O-i-PrOH system." J. Mat. Sci. 23 (1988) 2259-2266 (no month).

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