Coating processes – With post-treatment of coating or coating material – Chemical agent applied to treat coating
Patent
1998-07-07
2000-07-18
Nakarani, D. S.
Coating processes
With post-treatment of coating or coating material
Chemical agent applied to treat coating
10628712, 10628714, 10628716, 4272554, 4273977, B05D 304
Patent
active
060904488
ABSTRACT:
The invention relates to nanoporous dielectric films and to a process for their manufacture. Such films are useful in the production of integrated circuits. Such films are produced from a precursor of an alkoxysilane; a relatively low volatility solvent composition comprising an ether of a C.sub.1 to C.sub.4 alkylene glycol which is miscible in water and alkoxysilanes, having a hydroxyl concentration of 0.021 mole/cm.sup.3 or less, a boiling point of about 175 .degree. C. or more at atmospheric pressure and a weight average molecular weight of about 100 or more; a relatively high volatility solvent composition having a boiling point below that of the relatively low volatility solvent composition; optional water and an optional catalytic amount of an acid.
Drage James
Ramos Teresa
Smith Douglas M.
Wallace Stephen
Allied-Signal Inc.
Nakarani D. S.
Weise Leslie A.
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