Method and apparatus for controlling plating over a face of a su

Details Method and apparatus for controlling plating over a face of a su Method and apparatus for controlling plating over a face of a su

1998-05-21

2000-07-18

Gorgos, Kathryn

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating moving substrate

427421, 427425, 427 98, 427304, 205915, 205920, B05D 304, B05D 102, B05D 512, C25D 500, C25D 904

Patent

active

060902612

ABSTRACT:
According to aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a shaft extending into the tank, and a substrate holder mounted to the shaft. The shaft and the tank are rotatable relative to one another. The substrate holder is configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank.

REFERENCES:
patent: 4137867 (1979-02-01), Aigo
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4633804 (1987-01-01), Arii
patent: 5445172 (1995-08-01), Thompson et al.

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