Wafer polishing carrier and ring extension therefor

Details Wafer polishing carrier and ring extension therefor Wafer polishing carrier and ring extension therefor

1998-12-07

2000-07-18

Banks, Derris Holt

Abrading

Machine

Rotary tool

451287, 451288, B24B 500, B24B 2900

Patent

active

060899611

ABSTRACT:
A ring extension is provided for use with a semiconductor wafer carrier. The ring extension has a radially inner surface, the lower portion of which contacts a peripheral edge of a wafer to confine the wafer during a polishing operation. A recess or groove is formed in the inner surface and a passageway extending through the ring extension provides pressure relief to prevent slurry build up.

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