Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1982-01-12
1983-12-06
Pianalto, Bernard D.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 40, 427 48, 427128, 427129, 427132, 427252, 4272552, H01F 1002
Patent
active
044193815
ABSTRACT:
A base member is disposed in a reaction chamber and a raw material gas is introduced thereinto which contains at least a compound gas of a first magnetic material, or the compound gas of the first magnetic material and an oxidizing or nitriding gas, or the compound gas of the first magnetic material and a compound gas of a second magnetic material. A plasma generating electrical energy is applied to the raw material gas to obtain therein a stream of plasma of the raw material gas, by which a stream of active reaction products is passed over the base member. As a result of this, the first magnetic material, an oxide or nitride of the first magnetic material, or a magnetic material containing the first and second magnetic materials is deposited on the base member, forming thereon a magnetic material layer which consists principally of the first magnetic material, the oxide or nitride of the first magnetic material, or the magnetic material containing the first and second materials.
REFERENCES:
patent: 3243363 (1966-03-01), Helwig
patent: 3929604 (1975-12-01), Shirahata et al.
Baker Joseph J.
Ferguson Jr. Gerald J.
Pianalto Bernard D.
Semiconductor Energy Laboratory Co,. Ltd.
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