Micromechanical display logic and array

Details Micromechanical display logic and array Micromechanical display logic and array

1978-12-11

1980-10-21

Pitts, Harold I.

Communications: electrical

Audible indication

Percussion-type sound producer

340373, 340719, 340764, 340381, 29592R, 358233, G08B 524

Patent

active

042297320

ABSTRACT:
A display device, addressing circuitry, and semiconductor control logic are all portions of an integrated structure formed by thin film technology on a single silicon wafer. The display comprises a thin film micromechanical electrostatic form of light reflective display formed by depositing thin films upon a silicon wafer and selectively etching to form metal-amorphous oxide micromechanical leaves deflected by applying potential thereto to provide electrostatic deflection. MOSFET devices are also formed upon the silicon wafer in juxtaposition with a plurality of micromechanical display elements. Addressing circuitry is connected to the MOSFET devices.

REFERENCES:
patent: 3600798 (1971-08-01), Lee
patent: 3862360 (1975-01-01), Dill
patent: 3886310 (1975-05-01), Goldberg
patent: 3896338 (1975-07-01), Nathanson
patent: 4006383 (1977-02-01), Luo
patent: 4087810 (1978-05-01), Hung
patent: 4113360 (1978-09-01), Baur
Thomas et al., IEEE Trans. Electr. Dev. ED-22 765, (1975).
Petersen, "Micromechanical Light Deflector Array," IBM Technical Disclosure Bulletin, 20, No. 1, 355 (Jun. 1977).
Petersen, "Micromechanical . . . Silicon," Appl. Phys. Lett. 31, 521-523 (1977).

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