Stock material or miscellaneous articles – Structurally defined web or sheet – Continuous and nonuniform or irregular surface on layer or...
Patent
1991-01-15
1993-09-14
Robinson, Ellis P.
Stock material or miscellaneous articles
Structurally defined web or sheet
Continuous and nonuniform or irregular surface on layer or...
428141, 428161, 428403, 428407, 428323, 428426, 4284111, B32B 3300
Patent
active
052447120
ABSTRACT:
A synthetic diamond wafer grown by deposition from a plasma has a smooth, substrate side face and a rough, deposition side face. The rough face is coated with a bonding agent which fills the valleys and is finished so that its surface is parallel to the substrate side face to permit photolithographic processing of the wafer. Also disclosed is a multi-wafer laminate of two or more diamond film layers bonded together with an interlayer. Smooth, flat outer faces of the layers are oriented mutually parallel. The inner, bonded faces may be rough. A filler of diamond particles in the bonding agent improves the thermal conductivity of the laminate.
REFERENCES:
Ravi et al "Silicon On Insulator Technology Using CVC Diamond Films" Proc. Electrochem Soc pp. 24-37, Dec. 1989.
Norton Company
Robinson Ellis P.
Turner A. A.
Ulbrich Volker R.
LandOfFree
Laminated diamond substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laminated diamond substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laminated diamond substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2025153