Method of making a head slider

Details Method of making a head slider Method of making a head slider

1998-03-19

2000-07-18

Hall, Carl E.

Metal working

Method of mechanical manufacture

Electrical device making

264220, 264225, 360103, 360104, G11B 542

Patent

active

06088908&

ABSTRACT:
In a method for forming a horizontal head slider having a media opposing surface flying above or coming into contact with a recording medium, a film-like surface of a head for recording/reproducing information provided in parallel to the media opposing surface, and a rail portion provided on the media opposing surface for generating a pressure for ensuring stable flying or contact. The rail portion has a planar portion and a taper portion, and all of the shaping accuracy of the bottom surface of the slider and the rail, the adhesive property to a sacrificial layer overlaid thereon and the surface smoothness of the rail surface are enhanced. When the rail portion is formed, a part of mold for the planar portion is prepared by a metallic layer 2 and a mold for the taper portion is prepared by a photoresist layer 3, and a sacrificial layer 4, a media opposing surface layer 6 and a slider body layer 6 are formed thereon in this order.

REFERENCES:
patent: 3460244 (1969-08-01), Metz
patent: 5228184 (1993-07-01), Kishi
IBM Technical Disclosure Bulletin, vol. 36, No. 10, Oct. 1993; Patterned Substrate for Improved Slider Fabrication; pp. 409-410.
IBM Technical Disclosure Bulletin, vol. 36, No. 11, Nov. 1993; Device for Fast Access of Multiple Recording Tracks of Magnetic Disk Drives; pp. 155-156.
IEEE Transactions on Magnetics, vol. 25, p. 3190, 1989; "A New Thin Film Head Generation", J.P. Lazzari, P. Derou-Dauphin.
IEEE Transactions on Magnetics; vol. 25, p. 3686, 1989; "A New Approach To Making Think Film Head-Slider Devices", Daniel W. Chapman.
W. Henke, W. Hoppe, H.J. Quenzer, P. Staudt-Fischbach and B. Wagner; "Simulation and Experimental Study of gray-Tone Lithography for the Fabrication of Arbitrarily Shaped Surfaces", IEEE, Micro Electro Mechanical Systems, p. 205, 1994.

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