Piezoelectric/electrostrictive element having electrode film(s)

Details Piezoelectric/electrostrictive element having electrode film(s) Piezoelectric/electrostrictive element having electrode film(s)

1994-03-08

1996-04-02

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 310330, 310364, 310365, H01L 4108

Patent

active

055043887

ABSTRACT:
A piezoelectric/electrostrictive element is disclosed which includes at least one piezoelectric/electrostrictive portion each of which consists of a lower electrode film, a piezoelectric/electrostrictive film and an upper electrode film. In this element, at least the lower one of the electrode films has a surface roughness represented by maximum peak-to-valley roughness height Rmax. or Ry which is in a range of 3 .mu.m.about.14 .mu.m, and a surface roughness represented by centerline mean roughness Ra which is not larger than 2 .mu.m.

REFERENCES:
patent: 5089455 (1992-02-01), Ketcham et al.
patent: 5126615 (1992-06-01), Takeuchi et al.
patent: 5210455 (1993-05-01), Takeuchi et al.
patent: 5281888 (1994-01-01), Takeuchi et al.

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