Method of making a semiconductor memory device having a floating

Details Method of making a semiconductor memory device having a floating Method of making a semiconductor memory device having a floating

1993-12-23

1996-04-02

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437977, 148DIG138, H01L 218247

Patent

active

055040225

ABSTRACT:
A method of forming a non-volatile semiconductor memory device includes the steps of forming a generally periodical undulation on a surface of a silicon substrate with a pitch of 1-20 nm, by cleaning the surface of the substrate by a cleaning solution to form a native silicon oxide film that covers the surface of the silicon substrate with a thickness that changes generally periodically, followed by a selective etching process applied to the native silicon oxide film thus formed to expose the surface of the silicon substrate, and forming a tunneling oxide film on the undulated surface of the substrate by applying a thermal oxidation such that the tunneling oxide film has a thickness that changes generally periodically with a pitch of 1-20 nm.

REFERENCES:
patent: 4757360 (1988-07-01), Faraone
patent: 4774202 (1988-09-01), Pan et al.
patent: 4933904 (1990-06-01), Stewart et al.
patent: 5017505 (1991-05-01), Fujii et al.
patent: 5028560 (1991-07-01), Tsukamoto et al.
patent: 5089867 (1992-02-01), Lee
patent: 5229334 (1993-07-01), Kato
patent: 5238500 (1993-08-01), Bergman
patent: 5294568 (1994-03-01), McNeilly et al.
patent: 5324676 (1994-06-01), Guterman
patent: 5328558 (1994-07-01), Kawamura
Ghandhi, Sorab K., "VLSI Fabrication Principles", pp. 479-482, 522, 1983.

Affiliated with

Also associated with

Rating

Method of making a semiconductor memory device having a floating does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making a semiconductor memory device having a floating, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making a semiconductor memory device having a floating will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2015961