Process of fabricating bipolar transistor having epitaxially gro

Fishing – trapping – and vermin destroying

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437 89, 437 90, 437131, 437162, 148DIG10, 148DIG11, 148DIG124, 257587, 257592, 257593, H01L 21265

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055040187

ABSTRACT:
A bipolar transistor has a base rink structure epitaxially grown from an overhang portion of a poly-crystal silicon base electrode and an epitaxial collector layer and an intrinsic base structure grown on a concave central portion of the base rink structure after a diffusion stage of a dopant impurity into the base rink structure, and the intrinsic base structure is electrically connected through a buried collector region passing through the concave central portion into an epitaxial collector layer, thereby maintaining the dopant impurity profile in the intrinsic base structure without deterioration of transistor characteristics.

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patent: 5432104 (1995-07-01), Sato

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