Void detection in metallization patterns

Fishing – trapping – and vermin destroying

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437957, 437171, 374 5, 324766, H01L 7166, G01N 2572, G01N 2720

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active

055040179

ABSTRACT:
Voids in a metallization pattern comprising a barrier layer, such as those generated by stress migration, are detected by applying a current across a test section of the metallization pattern to generate hot spots which are detected as by employing an infrared microscope or with a liquid crystalline material.

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