Probe card changer system and method

Details Probe card changer system and method Probe card changer system and method

1994-01-28

1995-11-28

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

439331, G01R 3102

Patent

active

054711487

ABSTRACT:
A prober tester interface system is described which includes a carriage having a plurality of cam followers on its perimeter and a cam ring having a plurality of cam grooves on its interior. Positioning means are detachably coupled to the carriage for positioning the cam followers in the cam grooves. Rotating means are coupled to the cam ring for rotating the cam ring, thereby causing the cam followers to track in the cam grooves and move the carriage in a direction substantially perpendicular to the plane of the cam ring. A method is also described in which a carriage having a probe card disposed therein and a plurality of cam followers on its perimeter is positioned in a cam ring having a plurality of cam grooves located on its interior to engage the cam followers in the cam grooves. The probe card is equipped with a plurality of test pins. The cam ring is then rotated, thereby causing the cam followers to track in the cam grooves and move the carriage in a direction perpendicular to the plane of the cam ring, thereby coupling the prober card to a test head. A semiconductor wafer is then brought into contact with the test pins and probed.

REFERENCES:
patent: 4105970 (1978-08-01), Katz
patent: 4746855 (1988-05-01), Wrinn
patent: 4757254 (1988-07-01), Staples
patent: 4935696 (1990-06-01), DiPerna
patent: 5019771 (1991-05-01), Yang et al.
patent: 5030907 (1991-07-01), Yih et al.
patent: 5068601 (1991-11-01), Parmenter
patent: 5254939 (1993-10-01), Anderson et al.
U.S. Ser. No. 08/089,874 filed Jul. 9, 1993.
U.S. Ser. No. 08/082,403 filed Jun. 24, 1993.

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