Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Patent
1999-09-17
2000-10-03
Phan, James
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
359198, 359199, 359223, 359224, 369112, 369 4414, G02B 2608
Patent
active
061281220
ABSTRACT:
A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
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patent: 5719846 (1998-02-01), Matoba
patent: 6002661 (1999-12-01), Abe et al.
Burns et al., Nonlinear Flexures for Stable Deflection of an Electrostatically Actuated Micromirror, Proc. SPIE, vol. 3226, Austin, TX, Sep. 1997.
Jerman, The Fabrication and Use of Micromachined Corrugated Silicon Diaphragms, Sensors and Actuators, A21-A23 (1990) pp. 988-992 (No Month).
Judy, Mechanisms Using Sidewall Beams, U.C. Berkeley, 1994 (No Momth).
Seeger et al., Stabilization of Electrostatically Actuated Mechanical Devices, Proc. Transducers '97, Chicago, IL, pp. 1133-1136, Jun. 1997.
Drake Joseph D.
Grade John D.
Jerman John H.
Phan James
Seagate Technology Inc.
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