Charged-particle beam apparatus

Details Charged-particle beam apparatus Charged-particle beam apparatus

1990-07-09

1991-03-19

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 2504922, 2504923, H01J 3709, H01J 3720

Patent

active

050013491

ABSTRACT:
A charged-particle beam apparatus comprises a beam splitting/alignment system whereby individual beams or groups of individual beams can be independently aligned so that they can be brought out of focus in a focal plane of the individual beams, so that a beam limiting diaphragm arranged at that area is irradiated more uniformly with a smaller beam loss.

REFERENCES:
patent: Re29500 (1977-12-01), Hoppe
patent: 3745494 (1973-07-01), Sawyer
patent: 4097745 (1978-06-01), Parks
patent: 4136285 (1979-01-01), Anger et al.
patent: 4153843 (1979-05-01), Pease
patent: 4246487 (1981-01-01), Anger et al.
patent: 4325084 (1982-04-01), van Gorkom et al.
patent: 4419580 (1983-12-01), Walker et al.
patent: 4524277 (1985-06-01), Shimura et al.
patent: 4568833 (1986-02-01), Roelofs
patent: 4724328 (1988-02-01), Lischke
patent: 4810889 (1989-03-01), Yokomatsu et al.

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